・To construct a low cost NTD Silicon production facility

・Need much more flat neutron flux than the traditional equipments with nuclear reactor to extend the 　doping uniformity which dominates semiconductor chip quality.

 

● Datasheet

 

● Outside Demension

<<DISAC Outline Image>>Graphics from basic design and be subject to change.

 

** The requirement specification of this customer was 2 ports (dual neutron source for irradiation). The system with more irradiation ports can be considered by evaluating their neutron diffraction on demands. Acceleration energy or current can be reviewed and extended for neutron energy of irradiation.

 

Cost 　： US$ 32,000.-
Period ： 90 Days